Flat track XY platform series

Open structure, XY integrated design direct drive platform, bottom shaft dual motor drive, excellent dynamic performance, better geometric performance and higher load-bearing capacity, taking into account product characteristics such as large stroke, high precision, heavy load, and low lateral height. Low side height, small Abbe error, compact platform structure, strong driving capability, dual motor drive for the lower shaft
Both the upper and lower axes can reach a maximum speed of 2000mm/s without load, an acceleration of up to 2g with an electronic resolution of 1nm, and a small step size of less than 20nm. Suitable for industrial fields and scientific research projects that require nanometer level positioning accuracy, such as measurement, wafer inspection, surface roughness detection, laser cutting, etc.