Flat track XY platform series

Open structure, XY integrated design direct drive platform, bottom shaft dual motor drive, excellent dynamic performance, better geometric performance and higher load-bearing capacity, taking into account product characteristics such as large stroke, high precision, heavy load, and low lateral height. Low side height, small Abbe error, compact platform structure, strong driving capability, dual motor drive for the lower shaft
Both the upper and lower axes can reach a maximum speed of 2000mm/s without load, an acceleration of up to 2g with an electronic resolution of 1nm, and a small step size of less than 20nm. Suitable for industrial fields and scientific research projects that require nanometer level positioning accuracy, such as measurement, wafer inspection, surface roughness detection, laser cutting, etc.

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Flat track XY platform series

Plane-XY series specifications Single axis precision screw platform
Parameter Table
Platform model	PLM-Plane-XY-150	PLM-Plane-XY-250	PLM-Plane-XY-350
Effective stroke	150 mmx150 mm	250 mmx250 mm	350 mmx350 mm
positioning accuracy	±0.3 μm	±0.3 μm	±0.3 μm
Bi directional repetitive positioning accuracy	+0.15 um	±0.15 μm	±0.15 μm
pitch	7 arc sec	9 arc sec	11 are sec
yaw	7 arc sec	9 arc sec	11 are sec
Straightness	±1.5 μm	±2 μm	±2.5 μm
resolution	1 nm
Maximum acceleration	2 g
maximum speed	2000 mm/s
Maximum horizontal load	45 KG	45 KG	45 KG
Continuous thrust	Upper axis: 153 N Lower axis: 306 N
Peak thrust	Upper axis: 864 N Lower axis: 1728 N
Minimum step quantity	20 nm
Platform quality	30 KG	40 KG	50 KG
Platform material	Aluminium
mean time between failures	27000 Hours