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H-shaped flat air floating platform PlaneH series

Product Features:

  • High dynamic performance
  • Smooth movement without friction or vibration
  • Grating ruler resolution of 1nm
  • Low thermal expansion coefficient
  • It can be evaluated and customized according to customer needs such as configuration, itinerary, load, special structure, etc.

 

Structural characteristics:

  • The dual drive crossbeam adopts an H-bridge structurewith air guide rails
  • XY integrated type
  • Low Abbe arm

 

Application scenarios

Suitable for wafer inspection applications of different sizes and processes

    H-shaped flat air floating platform PlaneH series

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    H-shaped flat air floating platform
    PlaneH series specifications
    Parameter Table
    Platform model PLM-PlaneH-XY-400
    Effective stroke 400 mmx400 mm
    Positioning accuracy ±0.3 μm
    Bi directional repetitive positioning accuracy ±0.2 μm
    Pitch 2.5 arc sec
    Yaw 2.5 arc sec
    Straightness ±1.5 um
    Flatness ±1.5 μm
    Resolution 1 nm
    Maximum acceleration 0.5 g
    Maximum speed 500 mm/s
    Maximum horizontal load 30 KG
    Continuous thrust Upper axis: 204N Lower axis: 510N
    Peak thrust Upper axis:1152N Lower axis: 2880N
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    Who is Lingchen? Can I trust a new supplier?

    Suzhou Lingchen acquisition computer Co. LTD was established in 2006 and is located in suzhou city jiangsu provinceChina,enjoying convenient transportation and beautiful environment. Our company covers an area of 25000 square meters and has 420 employees. Our main products include industrial computer, PLC,Motion control card,remote lO,linear motor.Besides, we are making great efforts to develop new products to meet different requirements. In order to provide customers with satisfactory products and services, we have established a modern quality management system according to international standards.Our company has oscilloscope,high and low temperature test chamber.Motion control test bench equipment to strictly control the product quality.

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