High precision positioning platform

High precision linear guide, servo motor drive, grating closed-loop feedback, high reliability drive mechanism, with power-off brake function to prevent heavy objects from falling, long service life and other product features. By adopting a flat lifting mechanism, the load can be directly moved to maintain the shortest possible height within a long range of travel, optimizing the impact of system errors and helping to improve the overall performance
The structural characteristics such as body precision performance are suitable for fields such as light source alignment and wafer inspection.

High precision linear guide, servo motor drive, grating closed-loop feedback, high reliability drive mechanism, with power-off brake function to prevent heavy objects from falling, long service life and other product features. By adopting a flat lifting mechanism, the load can be directly moved to maintain the shortest possible height within a long range of travel, optimizing the impact of system errors and helping to improve the overall performance
Structural characteristics such as body precision performance. Suitable for defect detection, optical lens detection, and precision machining in the semiconductor field, providing Z-axis precision positioning.

Nano level positioning accuracy, driven by linear motor, using cross roller guide rail, with * * * dynamic performance and positioning accuracy. The no-load cut-off frequency can reach over 100Hz, with a resolution of 1nm, repeat positioning accuracy of ± 100nm, positioning accuracy of ± 250nm, and other product features. Dual cylinder counterweight, high dynamic performance (cut-off frequency greater than 100Hz), intersecting roller guide rail, flexible configuration options (customizable for different strokes), in-situ stability of 3nm (equipped with linear drive, with vibration isolation laboratory environment) and other structural features. Suitable for fiber optic composites in the communication field, circular crystal defect detection in the semiconductor field, gene sequencing in the biomedical field, and laser micro/nano processing industries.

A vertical Z-direction platform with nanometer level positioning accuracy, driven by a linear motor, using cross roller guide rails, with * * * * dynamic performance and positioning accuracy, resolution of 1nm, repeat positioning accuracy+100nm, positioning accuracy+200nm and other product features. High precision direct drive lifting platform, high dynamic performance (no-load cut-off frequency greater than 120Hz), low lateral height, suitable for compact space applications, can be equipped with pneumatic balance, * large load of 15kg, can form a multi axis system with Surface Theta or linear axis, in place stability of 5nm (equipped with linear driver, with vibration isolation laboratory environment) and other structural features. Suitable for industries such as photolithography, detection and packaging, shape wheel measurement, and gene sequencing in the biomedical field within the semiconductor industry.

Open structure, XY integrated design direct drive platform, bottom shaft dual motor drive, excellent dynamic performance, better geometric performance and higher load-bearing capacity, taking into account product characteristics such as large stroke, high precision, heavy load, and low lateral height. Low side height, small Abbe error, compact platform structure, strong driving capability, dual motor drive for the lower shaft
Both the upper and lower axes can reach a maximum speed of 2000mm/s without load, an acceleration of up to 2g with an electronic resolution of 1nm, and a small step size of less than 20nm. Suitable for industrial fields and scientific research projects that require nanometer level positioning accuracy, such as measurement, wafer inspection, surface roughness detection, laser cutting, etc.

Dual axis four motor drive, excellent dynamic performance, resolution of 1nm, repeat positioning accuracy of 100nm, positioning accuracy+400nm, in-situ stability of 3nm, multiple feedback options. The use of intersecting roller guide rails has the characteristics of compact structure, low side height, and small Abbe error. Suitable for industrial and scientific research projects that require nanometer level positioning accuracy, such as laser processing/flying shot scanning detection/measurement detection/surface roughness detection/laser cutting.

Servo ball screw drive, high-performance and low-cost solution, high rigidity mechanical structure, flexible selection of configuration options. Provide feedback options for grating ruler and rotary encoder, with self-locking function for power-off brake. Adopting AC brushless servo motor and screw drive, the maximum speed can reach 300mm/s. The PS series can meet the requirements of horizontal placement of linear axes and is selected
After selecting the power-off white lock brake configuration, the PS series can be used as a Z-axis platform and can be used in conjunction with the PM series. Suitable for industries such as OLED cutting/PCB drilling/CNC machining/biotechnology/IC packaging/wafer inspection.

The single-axis precision linear stage series is an advanced device designed for high-precision positioning. With its high performance and low-cost solutions, this series of products has become an ideal choice in many industries. Its high-rigidity mechanical structure ensures stability and reliability in various working environments. At the same time, the flexible configuration options allow users to choose different strokes and widths according to specific needs. The stroke can reach up to 300mm, meeting a variety of application scenarios.

In terms of structural design, the positioning platform adopts linear motor drive technology, which has fast movement speed and excellent dynamic performance. Due to low friction, this device can easily achieve precise position control, which is particularly suitable for applications that require large stroke, high precision and high speed. Whether in automated production lines, laboratory equipment or high-end manufacturing, the direct drive motor high-precision positioning platform can show excellent performance.

In addition, in order to meet the needs of different customers, we also provide customized services, and users can choose a larger stroke according to specific application requirements. This flexibility enables our products to adapt to various complex working environments, further enhancing their market competitiveness. In short, the direct-drive motor high-precision positioning platform is an ideal choice for those who pursue efficiency, precision and flexibility.

High performance direct drive air flotation platform, high dynamic performance, using air surrounding preloading, non-contact design, for high-performance scanning.Tailored for application and detection, this air flotation platform has nanometer level positioning accuracy and is driven by a linear motor. It can be used as a single axis sensor

High performance direct drive air flotation platform, high dynamic performance, using air surrounding preloading, non-contact design, for high-performance scanning
Tailored for application and detection, this air flotation platform has nanometer level positioning accuracy and is driven by a linear motor. It can be used as a single axis sensor