IC carrier board LDl exposure air flotation platform PDM-2K600-Z10-X160-Y1350-LDl

Product Features:

• High dynamic performance
• XY adopts a fully enclosed air floating guide rail with good stability
• High precision zero expansion grating feedback is selected, with a low expansion coefficient and minimal influence from temperature drift

• Z-axis uses magnetic springs to balance the load, customizable
• The itinerary, size, and cables can be customized according to Customer requirements

• It can be evaluated and customized according to customer needs such as configuration, itinerary, load, special structure, etc

Structural characteristics:

• Multi axis air floating platform, using air floating XY stacking structure
• Hanging K-axis and Z-axis on the side of the crossbeam (mechanical guide rail)

• Direct drive control of ironless linear motor without cogging effect
• Smooth operation at low speeds (with minimal speed fluctuations) Equipped with a non-contact high-precision grating ruler, it has excellent dynamic performance, positioning accuracy, and repeatability accuracy

• Selection of high-precision grating position feedback for multi axis air flotation platform

• The repeatability of the entire journey is less than 0.5um
• The positioning accuracy is less than 1um.

Application scenarios

Mainly used in semiconductor production lines, microelectronics production, LCD displays LCD displays, circuit board production.PCB products, and other industrial projects require high precision and efficiency.