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Large load Z-axis lifting platform ZMS series

High precision linear guide, servo motor drive, grating closed-loop feedback, high reliability drive mechanism, with power-off brake function to prevent heavy objects from falling, long service life and other product features. By adopting a flat lifting mechanism, the load can be directly moved to maintain the shortest possible height within a long range of travel, optimizing the impact of system errors and helping to improve the overall performance
Structural characteristics such as body precision performance. Suitable for defect detection, optical lens detection, and precision machining in the semiconductor field, providing Z-axis precision positioning.

    Flat track XY platform series

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    Large load Z-axis lifting platform ZMS series specifications
    Parameter Table
    Platform model PLM-ZMS-23
    Effective stroke 23 mm
    Absolute positioning accuracy ±2 μm
    Bi directional repetitive positioning accuracy  ±1 μm
    Straightness ±2 μm
    resolution 0.1 μm
    maximum acceleration 2g
    Maximum speed 30 mm/s
    Maximum horizontal load 60 KG
    Platform quality 50 kg
    Platform material Aluminium
    mean time between failures 27000 Hours

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