Application of precision motion control platform in LDI direct writing exposure machine
TOKK's precision motion control platform helps LDI's direct writing exposure machine break through technical bottlenecks
As electronic products develop towards miniaturization and high density, the LDI direct writing exposure machine, as the core equipment of PCB and semiconductor manufacturing, cannot be separated from the support of precision motion control technology to improve its accuracy and efficiency.
Relying on its innovative technology in the field of motion control, TOKK has launched several high-performance platform solutions to help the industry break through technical bottlenecks. This article combines the actual application cases of TOKK products to analyze how the precision motion control platform can promote LDI equipment to higher accuracy and efficiency.
Single worktable motion platform: optimized structure and precision control
TOKK has achieved nano-level motion accuracy by streamlining the traditional double-table design and using a three-axis drive module (Z/X/Y axis) combined with static pressure air flotation guide technology:
1. The Z-axis drive
Wedge block is linked to the lead screw motor, and the vertical lifting accuracy reaches ±0.5μm
2. The X/Y-axis static pressure air flotation guide
Air film lubrication reduces friction, and the speed fluctuation is less than one thousandth, which is suitable for the production of high-end IC substrates with a line width of less than 15 microns.
In addition, the platform integrates a visual calibration system and a fixed exposure engine, which significantly shortens the calibration and exposure switching time and improves the yield by more than 15%.
Linear motor and marble base: Dynamic stability upgrade
TOKK uses a coreless linear motor (KYAC4000 series) and a Renishaw grating encoder, combined with a marble base with a low thermal expansion coefficient, to achieve high-speed and low-vibration control:
1. Linear motor direct drive
Eliminate the return error of the belt or gear drive, and control the speed fluctuation within 0.1%
2. Marble base
Strong anti-deformation ability ensures long-term stable operation of the equipment in a constant temperature workshop.
This solution has been applied to high-precision scenarios such as flexible circuit boards, and the production efficiency has been improved by 20%.
Multi-axis linkage and closed-loop feedback: Dynamic matching of expansion and contraction modes
In LDI expansion and contraction mode, TOKK achieves precise control through a multi-axis linkage control system and a real-time feedback algorithm:
1. Dynamic scaling compensation
Adjust the workbench position, cooperate with laser spot scaling, and the graphic size matching accuracy reaches ±1μm
2. Closed-loop control
Integrate a distance measurement sensor and visual calibration system to monitor PCB position in real time to ensure accurate positioning of exposure focus. This technology increases the yield of fine circuit boards (line width ≤10μm) from 85% to 95%.
Vacuum environment motion control: Optimize the ink curing effect
TOKK uses a vacuum filtration device and a precision motion platform to solve the gloss problem of solder mask ink:
1. Vacuum environment motion
Reduce the influence of air resistance on positioning accuracy
2. Sealed light-transmitting design
Acrylic material ensures laser penetration, and the utilization rate of ink free radicals is increased by 30%.
This solution fills the domestic technical gap and has been successfully applied to the high-end PCB solder mask process.
Material and structural innovation: high-rigidity lightweight design
To meet the needs of high-speed exposure, TOKK uses carbon fiber composite materials and aluminum alloy honeycomb structures, combined with algorithm optimization:
1. Lightweight design
The acceleration is increased to more than 2g to meet the high-frequency production needs of 5G communication boards
2. Thermal stability optimization
The thermal drift error is controlled within 0.3μm/℃.
TOKK's precision motion control platform has become the core driving force for LDI exposure machines to break through technical bottlenecks through structural optimization, material innovation, and intelligent algorithms.
In the future, with the further maturity of technologies such as linear motors and air-floating guides, as well as the deep integration of artificial intelligence and real-time feedback systems, TOKK will continue to promote LDI equipment to sub-micron precision and 10,000 pieces/hour efficiency, providing solid technical support for emerging fields such as semiconductor packaging and Mini LED.








