Plane Z-axis lifting platform series

A vertical Z-direction platform with nanometer level positioning accuracy, driven by a linear motor, using cross roller guide rails, with dynamic performance and positioning accuracy, resolution of 1nm, repeat positioning accuracy+100nm, positioning accuracy+200nm and other product features. High precision direct drive lifting platform, high dynamic performance (no-load cut-off frequency greater than 120Hz), low lateral height, suitable for compact space applications, can be equipped with pneumatic balance, * large load of 15kg, can form a multi axis system with Surface Theta or linear axis, in place stability of 5nm (equipped with linear driver, with vibration isolation laboratory environment) and other structural features. Suitable for industries such as photolithography, detection and packaging, shape wheel measurement, and gene sequencing in the biomedical field within the semiconductor industry.