Self balancing Z-direction motion stage series

Nano level positioning accuracy, driven by linear motor, using cross roller guide rail, with dynamic performance and positioning accuracy. The no-load cut-off frequency can reach over 100Hz, with a resolution of 1nm, repeat positioning accuracy of ± 100nm, positioning accuracy of ± 250nm, and other product features. Dual cylinder counterweight, high dynamic performance (cut-off frequency greater than 100Hz), intersecting roller guide rail, flexible configuration options (customizable for different strokes), in-situ stability of 3nm (equipped with linear drive, with vibration isolation laboratory environment) and other structural features. Suitable for fiber optic composites in the communication field, circular crystal defect detection in the semiconductor field, gene sequencing in the biomedical field, and laser micro/nano processing industries.

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Flat track XY platform series

Self balancing Z-direction motion table ART-Z series specifications
Parameter Table
Platform model	PLM-ART-Z-040	PLM-ART-Z-100	PLM-ART-Z-160
Effective stroke	40 mm	100 mm	160 mm
Absolute positioning accuracy	±0.3 um	±0.4 um	±0.5 um
Bi directional repetitive positioning accuracy	±0.1 um	±0.2 um	±0.25 um
pitch	10 arc sec	12 arc sec	12 arc sec
yaw	10 arc sec	10 arc sec	10 arc sec
roll	10 arc sec	10 arc sec	10 arc sec
Straightness	±2 μm	±2 μm	±2.5 μm
Flatness	±2 μm	±2 μm	±2.5 μm
resolution	1 nm
Minimum step quantity	5 nm
on-bottom stability	3 nm
maximum acceleration	500 m/s
Maximum speed	1g
Maximum horizontal load	12 KG
Continuous thrust	52 N
Peak thrust	288 N
Platform quality	2.7 kg	3.9 kg	5.2 kg
Platform material	Aluminium
mean time between failures	20000 Hours