Self balancing Z-direction motion stage series

Nano level positioning accuracy, driven by linear motor, using cross roller guide rail, with dynamic performance and positioning accuracy. The no-load cut-off frequency can reach over 100Hz, with a resolution of 1nm, repeat positioning accuracy of ± 100nm, positioning accuracy of ± 250nm, and other product features. Dual cylinder counterweight, high dynamic performance (cut-off frequency greater than 100Hz), intersecting roller guide rail, flexible configuration options (customizable for different strokes), in-situ stability of 3nm (equipped with linear drive, with vibration isolation laboratory environment) and other structural features. Suitable for fiber optic composites in the communication field, circular crystal defect detection in the semiconductor field, gene sequencing in the biomedical field, and laser micro/nano processing industries.