01
Single-axis air-bearing stage series
Product Features
High performance direct drive air flotation platform, high dynamic performance, using air surrounding preloading, non-contact design, for high-performance scanning tailored for application and detection, this air flotation platform has nanometer level positioning accuracy and is driven by a linear motor. It can be used as a single axis sensor.
It can be used or combined with other axes to form a multi axis system, which is very suitable for applications with heavy loads and other product characteristics. Utilize the elastic potential of air can serve as a supporting guide rail to achieve zero friction between the slide rail and the sliding table, with dynamic performance and positioning accuracy of * *. The air floating platform is positive
Negative pressure design, application of large volume load with uneven distribution of gravity on air floating guide rails, can better ensure air circulation The normal air gap and other structural characteristics of the track.
The single-axis air-bearing stage series is suitable for large-scale optical lens inspection, wafer defect detection, precision manufacturing, and packaging industries in the semiconductor field.
The single-axis air-bearing stage series is suitable for large-scale optical lens inspection, wafer defect detection, precision manufacturing, and packaging industries in the semiconductor field.
Specification parameters
| PLAM215 series Air floating single axis platform | |||||
| Parameter Table | |||||
| Platform model | PLAM215-100 | PLAM215-200 | PLAM215-300 | PLAM215-400 | PLAM215-500 |
| Effective stroke | 100mm | 200mm | 300mm | 400mm | 500mm |
| positioning accuracy | ±0.2 μm | ±0.3 μm | ±0.3 μm | ±0.4 μm | ±0.5 μm |
| Bi directional repetitive positioning accuracy | ±0.1 μm | ±0.1 μm | ±0.2 μm | ±0.25μm | ±0.3 μm |
| pitch | ±1.5 arc sec | ±2.5 arc sec | ±3 arc sec | ±4 arc sec | ±5 arc sec |
| yaw | ±1.5 arc sec | ±2.5 arc sec | ±3 arc sec | ±4 arc sec | ±5 arc sec |
| roll | ±1.5 arc sec | ±2.5 arc sec | ±3 arc sec | ±4 arc sec | ±5 arc sec |
| Straightness | ±0.5 μm | ±0.6 μm | ±0.75 μm | ±1.5 μm | ±2 μm |
| Flatness | ±0.5 μm | ±0.6 μm | ±0.75 μm | ±1.5 μm | ±2 μm |
| resolution | 1nm | ||||
| Maximum acceleration | 2g | ||||
| maximum speed | 1000 mm/s | ||||
| Maximum horizontal load | 35 kg | ||||
| Maximum radial load | 20 kg | ||||
| Continuous thrust | 78 N | ||||
| Peak thrust | 432 N | ||||
| on-bottom stability | ±10 nm | ||||
| Working pressure | 5.5 bar (recommended dry air, filter water and oil, filter dust to below 0.5 μ m) | ||||
| Platform quality | 19.1kg | 21.3kg | 23.5kg | 25.7kg | 27.9kg |
| Platform material | Aluminium | ||||
| mean time between failures | 25000Hours | ||||
| PLAM385 series Air floating single axis platform | |||||
| Parameter Table | |||||
| Platform model | PLAM385-100 | PLAM385-200 | PLAM385-300 | PLAM385-400 | PLAM385-500 |
| Effective stroke | 100mm | 200mm | 300mm | 400mm | 500mm |
| positioning accuracy | ±0.2 μm | ±0.3 μm | ±0.3 μm | ±0.4 μm | ±0.5 μm |
| Bi directional repetitive positioning accuracy | ±0.1 μm | ±0.1 μm | ±0.2 μm | ±0.25μm | ±0.3 μm |
| pitch | ±1.5 arc sec | ±2.5 arc sec | ±3 arc sec | ±4 arc sec | ±5 arc sec |
| yaw | ±1.5 arc sec | ±2.5 arc sec | ±3 arc sec | ±4 arc sec | ±5 arc sec |
| roll | ±1.5 arc sec | ±2.5 arc sec | ±3 arc sec | ±4 arc sec | ±5 arc sec |
| Straightness | ±0.5 μm | ±0.6 μm | ±0.75 μm | ±1.5 μm | ±2 μm |
| Flatness | ±0.5 μm | ±0.6 μm | ±0.75 μm | ±1.5 μm | ±2 μm |
| resolution | 1nm | ||||
| Maximum acceleration | 2g | ||||
| maximum speed | 1000 mm/s | ||||
| Maximum horizontal load | 60 kg | ||||
| Maximum radial load | 30 kg | ||||
| Continuous thrust | 156 N | ||||
| Peak thrust | 864 N | ||||
| on-bottom stability | ±10 nm | ||||
| Working pressure | 5.5 bar (recommended dry air, filter water and oil, filter dust to below 0.5 μ m) | ||||
| Platform quality | 40.9kg | 46.2kg | 51.5kg | 56.8kg | 62.1kg |
| Platform material | Aluminium | ||||
| mean time between failures | 25000Hours | ||||
Who is Lingchen? Can I trust a new supplier?
Suzhou Lingchen acquisition computer Co. LTD was established in 2006 and is located in suzhou city jiangsu provinceChina,enjoying convenient transportation and beautiful environment. Our company covers an area of 25000 square meters and has 420 employees. Our main products include industrial computer, PLC,Motion control card,remote lO,linear motor.Besides, we are making great efforts to develop new products to meet different requirements. In order to provide customers with satisfactory products and services, we have established a modern quality management system according to international standards.Our company has oscilloscope,high and low temperature test chamber.Motion control test bench equipment to strictly control the product quality.
