0102030405
Single-axis precision linear stage series
PM115LS
| PLAM-XY series Overlay air flotation platform | |||||
| Parameter Table | |||||
| Platform model | PLAM-XY-300-300 | ||||
| Effective stroke | 300mm*300mm | ||||
| positioning accuracy | ±0.3 μm | ||||
| Bi directional repetitive positioning accuracy | ±0.2 μm | ||||
| pitch | ±3 arc sec | ||||
| yaw | ±3 arc sec | ||||
| roll | ±3 arc sec | ||||
| Straightness | ±1 μm | ||||
| Flatness | ±1 μm | ||||
| resolution | 1nm | ||||
| Maximum acceleration | 2g | ||||
| maximum speed | 1000 mm/s | ||||
| Maximum horizontal load | 60 kg | ||||
| Maximum radial load | 30 kg | ||||
| Continuous thrust | Upper shaft 78 N | ||||
| lower shaft 156 N | |||||
| Peak thrust | Upper shaft 432 N | ||||
| lower shaft 864 N | |||||
| on-bottom stability | ±10 nm | ||||
| Working pressure | 5.5 bar (recommended dry air, filter water and oil, filter dust to below 0.5 μm) | ||||
| Platform quality | 75kg | ||||
| Platform material | Aluminium | ||||
| mean time between failures | 25000Hours | ||||

PM165LS
| PM165LS specification Single axis precision linear platform | ||||||||
| Parameter Table | ||||||||
| Platform model | PM165LS-100 | PM165LS-200 | PM165LS-300 | PM165LS-400 | PM165LS-500 | PM165LS-600 | PM165LS-800 | PM165LS-1000 |
| Effective stroke | 100mm | 200mm | 300mm | 400mm | 500mm | 600mm | 700mm | 800mm |
| positioning accuracy | ±1 μm | ±1.5 μm | ±1.5 μm | ±1.5 μm | ±2 μm | ±2 μm | ±2 μm | ±2 μm |
| Bi directional repetitive positioning accuracy | ±0.4 μm | ±0.5 μm | ±0.5 μm | ±0.5μm | ±0.5 μm | ±0.5 μm | ±0.5 μm | ±0.5 μm |
| pitch | 6 arc sec | 8.5 arc sec | 12 arc sec | 14.5 arc sec | 16.5 arc sec | 19 arc sec | 21 arc sec | 25 arc sec |
| yaw | 6 arc sec | 8.5 arc sec | 12 arc sec | 14.5 arc sec | 16.5 arc sec | 19 arc sec | 21 arc sec | 25 arc sec |
| roll | 6 arc sec | 8.5 arc sec | 12 arc sec | 14.5 arc sec | 16.5 arc sec | 19 arc sec | 21 arc sec | 25 arc sec |
| Straightness | ±2.5 μm | ±4 μm | ±6 μm | ±8 μm | ±9 μm | ±10 μm | ±12 μm | ±14 μm |
| resolution | 100nm | |||||||
| Maximum acceleration | 2m/s | |||||||
| maximum speed | 2g | |||||||
| Maximum horizontal load | 45 kg | |||||||
| Maximum radial load | 45 kg | |||||||
| Continuous thrust | 104 N | |||||||
| Peak thrust | 576 N | |||||||
| Minimum step quantity | 75 nm | |||||||
| Platform quality | 8 kg | 9.7 kg | 11.4 kg | 13.1 kg | 15.5 kg | 18.1 kg | 20.4 kg | 22.7 kg |
| Platform material | Aluminium | |||||||
| mean time between failures | 20000Hours | |||||||
PM190LS
| PM190LS specification Single axis precision linear platform | ||||||||
| Parameter Table | ||||||||
| Platform model | PM190LS-100 | PM190LS-200 | PM190LS-300 | PM190LS-400 | PM190LS-500 | PM190LS-600 | PM190LS-800 | PM190LS-1000 |
| Effective stroke | 100mm | 200mm | 300mm | 400mm | 500mm | 600mm | 700mm | 800mm |
| positioning accuracy | ±1 μm | ±1 μm | ±1 μm | ±1 μm | ±1 μm | ±1 μm | ±1.5 μm | ±1.5 μm |
| Bi directional repetitive positioning accuracy | ±0.3 μm | ±0.4 μm | ±0.4 μm | ±0.4μm | ±0.4 μm | ±0.4 μm | ±0.5 μm | ±0.5 μm |
| pitch | 6 arc sec | 8 arc sec | 10.5 arc sec | 12 arc sec | 14 arc sec | 16 arc sec | 20 arc sec | 24 arc sec |
| yaw | 6 arc sec | 8 arc sec | 10.5 arc sec | 12 arc sec | 14 arc sec | 16 arc sec | 20 arc sec | 24 arc sec |
| roll | 6 arc sec | 8 arc sec | 10.5 arc sec | 12 arc sec | 14 arc sec | 16 arc sec | 20 arc sec | 24 arc sec |
| Straightness | ±1.5 μm | ±2.5 μm | ±3.5 μm | ±4.5 μm | ±5.5 μm | ±6.5 μm | ±8 μm | ±10 μm |
| resolution | 100nm | |||||||
| Maximum acceleration | 3g | |||||||
| maximum speed | 2m/s | |||||||
| Maximum horizontal load | 45 kg | |||||||
| Maximum radial load | 45 kg | |||||||
| Continuous thrust | 130 N | |||||||
| Peak thrust | 720 N | |||||||
| Minimum step quantity | 75 nm | |||||||
| Platform quality | 14.5 kg | 16.8 kg | 19.4 kg | 21.8 kg | 24.2 kg | 26.6 kg | 29.4 kg | 32 kg |
| Platform material | Aluminium | |||||||
| mean time between failures | 27000Hours | |||||||
PM225LS
| PM225LS specification Single axis precision linear platform | ||||||||
| Parameter Table | ||||||||
| Platform model | PM225LS-100 | PM225LS-200 | PM225LS-300 | PM225LS-400 | PM225LS-500 | PM225LS-600 | PM225LS-800 | PM225LS-1000 |
| Effective stroke | 100mm | 200mm | 300mm | 400mm | 500mm | 600mm | 700mm | 800mm |
| positioning accuracy | ±1 μm | ±1 μm | ±1 μm | ±1 μm | ±1 μm | ±1 μm | ±1.5 μm | ±1.5 μm |
| Bi directional repetitive positioning accuracy | ±0.3 μm | ±0.4 μm | ±0.4 μm | ±0.4μm | ±0.4 μm | ±0.4 μm | ±0.5 μm | ±0.5 μm |
| pitch | 6 arc sec | 8 arc sec | 10.5 arc sec | 14 arc sec | 15 arc sec | 18 arc sec | 20 arc sec | 24 arc sec |
| yaw | 6 arc sec | 8 arc sec | 10.5 arc sec | 14 arc sec | 15 arc sec | 18 arc sec | 20 arc sec | 24 arc sec |
| roll | 6 arc sec | 8 arc sec | 10.5 arc sec | 14 arc sec | 15 arc sec | 18 arc sec | 20 arc sec | 24 arc sec |
| Straightness | ±2.5 μm | ±4 μm | ±4.5 μm | ±7.5 μm | ±8 μm | ±9 μm | ±10 μm | ±12 μm |
| resolution | 100nm | |||||||
| Maximum acceleration | 3g | |||||||
| maximum speed | 2m/s | |||||||
| Maximum horizontal load | 45 kg | |||||||
| Maximum radial load | 45 kg | |||||||
| Continuous thrust | 204 N | |||||||
| Peak thrust | 1152 N | |||||||
| Minimum step quantity | 100 nm | |||||||
| Platform quality | 14.5 kg | 16.8 kg | 19.4 kg | 21.8 kg | 24.2 kg | 26.6 kg | 29.4 kg | 32 kg |
| Platform material | Aluminium | |||||||
| mean time between failures | 27000Hours | |||||||
PM280LS
| PM280LS specification Single axis precision linear platform | ||||||
| Parameter Table | ||||||
| Platform model | PM280LS-300 | PM280LS-400 | PM280LS-500 | PM280LS-600 | PM280LS-700 | PM280LS-800 |
| Effective stroke | 300mm | 400mm | 500mm | 600mm | 700mm | 800mm |
| positioning accuracy | ±1 μm | ±1 μm | ±2 μm | ±2 μm | ±2 μm | ±2 μm |
| Bi directional repetitive positioning accuracy | ±0.5 μm | ±0.5 μm | ±0.6 μm | ±0.6μm | ±0.6 μm | ±0.8 μm |
| pitch | 12 arc sec | 16 arc sec | 18 arc sec | 20 arc sec | 22 arc sec | 25 arc sec |
| yaw | 12 arc sec | 16 arc sec | 18 arc sec | 20 arc sec | 22 arc sec | 25 arc sec |
| roll | 12 arc sec | 16 arc sec | 18 arc sec | 20 arc sec | 22 arc sec | 25 arc sec |
| Straightness | ±4 μm | ±4 μm | ±6 μm | ±6.5 μm | ±7 μm | ±8 μm |
| resolution | 100nm | |||||
| Maximum acceleration | 3g | |||||
| maximum speed | 2m/s | |||||
| Maximum horizontal load | 150 kg | |||||
| Maximum radial load | 150 kg | |||||
| Continuous thrust | 255 N | |||||
| Peak thrust | 1440 N | |||||
| Minimum step quantity | 200 nm | |||||
| Platform quality | 55 kg | 60 kg | 65 kg | 71 kg | 76 kg | 81 kg |
| Platform material | Aluminium | |||||
| mean time between failures | 27000Hours | |||||





