Single axis precision screw platform series

Servo ball screw drive, high-performance and low-cost solution, high rigidity mechanical structure, flexible selection of configuration options. Provide feedback options for grating ruler and rotary encoder, with self-locking function for power-off brake. Adopting AC brushless servo motor and screw drive, the maximum speed can reach 300mm/s. The PS series can meet the requirements of horizontal placement of linear axes and is selected
After selecting the power-off white lock brake configuration, the PS series can be used as a Z-axis platform and can be used in conjunction with the PM series. Suitable for industries such as OLED cutting/PCB drilling/CNC machining/biotechnology/IC packaging/wafer inspection.

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PS165LS

PS165LS specification Single axis precision screw platform
Parameter Table
Platform model		PS165LS-50	PS165LS-100	PS165LS-150	PS165LS-200	PS165LS-300	PS165LS-400
Effective stroke		100mm	200mm	300mm	400mm	500mm	600mm
positioning accuracy	Grating ruler	±1 μm	±1 μm	±1.5 μm	±2 μm	±2 μm	±2 μm
positioning accuracy	Rotary encoder	±1.5 μm	±1.5 μm	±1.5 μm	±2 μm	±2 μm	±2 μm
Bi directional repetitive positioning accuracy	Grating ruler	±0.3 μm	±0.35 μm	±0.4 μm	±0.45μm	±0.5 μm	±0.6 μm
Bi directional repetitive positioning accuracy	Rotary encoder	±1 μm	±1 μm	±1 μm	±1.5μm	±1.75 μm	±2 μm
pitch		6 arc sec	7 arc sec	8 arc sec	9 arc sec	10 arc sec	11 arc sec
yaw		6 arc sec	7 arc sec	8 arc sec	9 arc sec	10 arc sec	11 arc sec
roll		6 arc sec	7 arc sec	8 arc sec	9 arc sec	10 arc sec	11 arc sec
Straightness		±2 μm	±2.5 μm	±3 μm	±3.5 μm	±4 μm	±5 μm
resolution	Grating ruler	1nm, 100nm，0.1um
resolution	Rotary encoder	23bit
maximum speed		300m/s
Maximum Load	Horizontal placement	45 kg
Maximum Load	Vertical placement	25 kg
Minimum step quantity		100nm， 1um
Platform quality		7 kg	7.5 kg	8 kg	9 kg	10 kg	11 kg
Platform material		Aluminium
mean time between failures		27000Hours

PS115LS

PS115LS specification Single axis precision screw platform
Parameter Table
Platform model		PS115LS-50	PS115LS-100	PS115LS-150	PS115LS-200	PS115LS-250	PS115LS-300
Effective stroke		50mm	100mm	150mm	200mm	250mm	300mm
positioning accuracy	Grating ruler	±0.8 μm	±1 μm	±1 μm	±1.5 μm	±1.5 μm	±1.5 μm
positioning accuracy	Rotary encoder	±1 μm	±1 μm	±1 μm	±1.5 μm	±1.5 μm	±1.5 μm
Bi directional repetitive positioning accuracy	Grating ruler	±0.3 μm	±0.3 μm	±0.35 μm	±0.4μm	±0.45 μm	±0.5 μm
Bi directional repetitive positioning accuracy	Rotary encoder	±0.6 μm	±0.8 μm	±0.8 μm	±1μm	±1 μm	±1 μm
pitch		4 arc sec	6 arc sec	7 arc sec	8 arc sec	9 arc sec	10 arc sec
yaw		4 arc sec	6 arc sec	7 arc sec	8 arc sec	9 arc sec	10 arc sec
roll		4 arc sec	6 arc sec	7 arc sec	8 arc sec	9 arc sec	10 arc sec
Straightness		±2 μm	±2.5 μm	±3 μm	±3.5 μm	±4 μm	±4.5 μm
resolution	Grating ruler	1nm, 100nm，0.1um
resolution	Rotary encoder	23bit
Maximum Load	Horizontal placement	40 kg
Maximum Load	Vertical placement	20 kg
Minimum step quantity		100nm， 0.1um
Platform quality		5.1 kg	5.7 kg	6.2 kg	6.8 kg	7.4 kg	8.1 kg
Platform material		Aluminium
mean time between failures		27000Hours