Superimposed air-bearing stage series

High performance direct drive air flotation platform, high dynamic performance, using air surrounding preloading, non-contact design, for high-performance scanning.Tailored for application and detection, this air flotation platform has nanometer level positioning accuracy and is driven by a linear motor. It can be used as a single axis sensor

It can be used or combined with other axes to form a multi axis system, which is very suitable for applications with heavy loads and other product characteristics. Utilize the elastic potential of air.Can serve as a supporting guide rail to achieve zero friction between the slide rail and the sliding table, with dynamic performance and positioning accuracy of * *. The air floating platform is positive Negative pressure design, application of large volume load with uneven distribution of gravity on air floating guide rails, can better ensure air circulation The normal air gap and other structural characteristics of the track. Suitable for large-scale optical lens inspection and wafer defect detection in the semiconductor field Precision manufacturing and packaging industries.