Superimposed air-bearing stage series

Product Features

High performance direct drive air flotation platform, high dynamic performance, using air surrounding preloading, non-contact design, for high-performance scanning.Tailored for application and detection, this air flotation platform has nanometer level positioning accuracy and is driven by a linear motor. It can be used as a single axis sensor

It can be used or combined with other axes to form a multi axis system, which is very suitable for applications with heavy loads and other product characteristics. Utilize the elastic potential of air.Can serve as a supporting guide rail to achieve zero friction between the slide rail and the sliding table, with dynamic performance and positioning accuracy of * *. The air floating platform is positive Negative pressure design, application of large volume load with uneven distribution of gravity on air floating guide rails, can better ensure air circulation The normal air gap and other structural characteristics of the track. Suitable for large-scale optical lens inspection and wafer defect detection in the semiconductor field Precision manufacturing and packaging industries.

Specification parameters

PLAM-XY series Overlay air flotation platform
Parameter Table
Platform model	PLAM-XY-300-300
Effective stroke	300mm*300mm
positioning accuracy	±0.3 μm
Bi directional repetitive positioning accuracy	±0.2 μm
pitch	±3 arc sec
yaw	±3 arc sec
roll	±3 arc sec
Straightness	±1 μm
Flatness	±1 μm
resolution	1nm
Maximum acceleration	2g
maximum speed	1000 mm/s
Maximum horizontal load	60 kg
Maximum radial load	30 kg
Continuous thrust	Upper shaft    78 N
	lower shaft   156 N
Peak thrust	Upper shaft   432 N
	lower shaft    864 N
on-bottom stability	±10 nm
Working pressure	5.5 bar (recommended dry air, filter water and oil, filter dust to below 0.5 μm)
Platform quality	75kg
Platform material	Aluminium
mean time between failures	25000Hours

Who is Lingchen? Can I trust a new supplier?

Suzhou Lingchen acquisition computer Co. LTD was established in 2006 and is located in suzhou city jiangsu provinceChina,enjoying convenient transportation and beautiful environment. Our company covers an area of 25000 square meters and has 420 employees. Our main products include industrial computer, PLC,Motion control card,remote lO,linear motor.Besides, we are making great efforts to develop new products to meet different requirements. In order to provide customers with satisfactory products and services, we have established a modern quality management system according to international standards.Our company has oscilloscope,high and low temperature test chamber.Motion control test bench equipment to strictly control the product quality.