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Wafer cutting platform PDM-X400-Y600

Product Features:

  • Precision linear guide rail
  • Ultra high straightness
  • Open structure. low lateral height
  • Better geometric performance and higher load-bearing capacity
  • lt can be evaluated and customized according to customer needs such as configuration, itinerary, load, special structure, etc

 

Structural characteristics:

  • XY integrated design direct drive platform
  • Horizontal straightness less than ±1um
  • Equipped with auxiliary functions such as centralized oil injection and metal grounding.

 

Application scenarios

Suitable for various semiconductor industries such as wafer slicing and wafer inspection.

    Wafer cutting platform PDM-X400-Y600

    企业微信截图_17782245543240
    Wafer cutting platform
    PDM-X400-Y600specifications
    Parameter Table
    Platform model PDM-X400-Y600
    Axial X-axis Y-axis
    Effective stroke 400mm 600 mm
    Repeatability ≤±1 μm
    Compensation based positioning accuracy ≤±1 μm
    Horizontal straightness ≤± 1 μm (1.5 μm/within 200 strokes in the middle) ≤±1 μm
    Vertical straightness ≤±1.5μm ≤±1.5 μm
    Verticality between XY ≤5μm
    Maximum speed 1000mm/s 300mm/s
    Maximum acceleration 2 G 0.5 G
    Load 25kg
    Line length Outside the drag chain3m
    Motor parameters
    Cooling method Self cooling water-cooling
    Continuous thrust 722.6 N 1159.3 N
    Peak thrust 1610.5 N
    Force constant ±10% 153.0 N/Arms
    Reverse electromotive force constant+10% 124.9 Vpeak/(m/s)
    Motor constant @ 25 58.2 N/Sqrt (W)
    Interphase resistance @ 25 4.6 Ω
    Interphase inductance ±30% 116.0 mH
    Persistent current 4.8 Arms 8.2 Arms
    Peak current 14.4 Arms
    Continuous thermal power 204.9 W 597.9 W
    Thermal dissipation constant 2.8W/C 8.0W/ C
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    Who is Lingchen? Can I trust a new supplier?

    Suzhou Lingchen acquisition computer Co. LTD was established in 2006 and is located in suzhou city jiangsu provinceChina,enjoying convenient transportation and beautiful environment. Our company covers an area of 25000 square meters and has 420 employees. Our main products include industrial computer, PLC,Motion control card,remote lO,linear motor.Besides, we are making great efforts to develop new products to meet different requirements. In order to provide customers with satisfactory products and services, we have established a modern quality management system according to international standards.Our company has oscilloscope,high and low temperature test chamber.Motion control test bench equipment to strictly control the product quality.

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