0102030405
ZTT flat fine-tuning platform series
Flat track XY platform series

| ZTT flat fine-tuning platform ZTT series specifications | |||
| Parameter Table | |||
| Platform model | PLM-ZTT-4 | ||
| axial | Z | θX | θY |
| Effective stroke | 4 | 2 | 2 |
| Absolute positioning accuracy | ±0.5 um | ||
| repeatability | ±0.25 um | ||
| pitch | ±10 arc sec | ±1.5 arc sec | ±1.5 arc sec |
| yaw | ±10 arc sec | ||
| Straightness | ±1.5 μm | ||
| Flatness | ±1.5 μm | ||
| maximum speed | 1g | ||
| Maximum acceleration | 200 m/s | ||
| Minimum step quantity | 100 Nm | 1arc sec | 1arc sec |
| Maximum Load | 10KG | ||
| Platform quality | 6.5 kg | ||
| Platform material | Aluminium | ||
| mean time between failures | 27000 Hours | ||











