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ZTT flat fine-tuning platform series

High precision linear guide, servo motor drive, grating closed-loop feedback, high reliability drive mechanism, with power-off brake function to prevent heavy objects from falling, long service life and other product features. By adopting a flat lifting mechanism, the load can be directly moved to maintain the shortest possible height within a long range of travel, optimizing the impact of system errors and helping to improve the overall performance
The structural characteristics such as body precision performance are suitable for fields such as light source alignment and wafer inspection.

    Flat track XY platform series

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    ZTT flat fine-tuning platform ZTT series specifications
    Parameter Table
    Platform model PLM-ZTT-4
    axial Z θX θY
    Effective stroke 4 2 2
    Absolute positioning accuracy ±0.5 um
    repeatability ±0.25 um
    pitch ±10  arc sec ±1.5 arc sec ±1.5 arc sec
    yaw ±10  arc sec
    Straightness ±1.5  μm
    Flatness ±1.5  μm
    maximum speed 1g
    Maximum acceleration 200 m/s
    Minimum step quantity 100 Nm 1arc sec 1arc sec
    Maximum Load 10KG
    Platform quality 6.5 kg
    Platform material Aluminium
    mean time between failures 27000 Hours

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