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ZTT flat fine-tuning platform series
Flat track XY platform series


ZTT flat fine-tuning platform ZTT series specifications | |||
Parameter Table | |||
Platform model | PLM-ZTT-4 | ||
axial | Z | θX | θY |
Effective stroke | 4 | 2 | 2 |
Absolute positioning accuracy | ±0.5 um | ||
repeatability | ±0.25 um | ||
pitch | ±10 arc sec | ±1.5 arc sec | ±1.5 arc sec |
yaw | ±10 arc sec | ||
Straightness | ±1.5 μm | ||
Flatness | ±1.5 μm | ||
maximum speed | 1g | ||
Maximum acceleration | 200 m/s | ||
Minimum step quantity | 100 Nm | 1arc sec | 1arc sec |
Maximum Load | 10KG | ||
Platform quality | 6.5 kg | ||
Platform material | Aluminium | ||
mean time between failures | 27000 Hours |